Description

This paper will address the changing cleanroom market and technology requirements facing the semiconductor industry. How the industry and owners of semcionductor cleanrooms are responding to the financial pressures and the need to balance technological requirements for advance process areas will also be presented. Technology roadmap and technological concerns with possible solutions for cleanroom owners will also be addressed.

Units: Dual

Citation: Symposium, ASHRAE Transactions, vol. 109, pt. 2, Kansas City, 2003

Product Details

Published:

2003

Number of Pages:

8

File Size:

1 file , 160 KB

Product Code(s):

D-20879